Beijing Technol Science Co., Ltd.  

Product Name: Split Thermal and Electron Beam Evaporator System E-Beam and Thermal Evaporation System for Lab Model NO.: TEMD600 Type: E-Beam Evaporation Application: School, Lab Certification: ISO Material: Stainless Steel Structure: Cylinder Customized: Customized Trademark: Technol Transport Package: Export Wooden Box Specification: Customize Origin: China HS Code: 8486202200 Product Description Features:*TEMD600 6-Pocket Vacuum E-beam Evaporation Systemhas the characteristics of high vacuum, fast pumping speed, and convenient substrate loading and unloading.*Equipped with E-type electron beam evaporation source and 2 sets of thermalevaporation sources, online film thickness monitorsystem, and optional ion source cleaning and auxiliary deposition device.*It has the advantages of uniform film formation, small outgassing and uniform temperature. In addition to the vapor deposition of conventional low melting point metals, TEMD500 can also vapor deposit refractory metals and non-metal oxides and alloys and other materials, which can be used to prepare photovoltaic films, semiconductor device films, ferroelectric films, etc..Technical Parameters:Equipment Name: E-beam EvaporatorModel: TEMD600Chamber Structure: Vertical cylindrical side door structure, rear pumping systemChamber Size: Φ600×H750mmBaking Temperature: Room temperature to 300ºCRotating Substrate Holder: Flat-plate Φ350mmFilm Thickness Nonuniformity: ≤±5.0% Evaporation Source: 4~6 Cave crucibles(optional)/2 groups of evaporation sourcesControl Method: PLC Control/IPC automatic control(optional)Occupied Area: (Mainframe) L1500×W850×H1750mmPower: ≥20kWOptional: Kaufman ion source, film thickness monitor, air cooled chiller, air compressor