Beijing Technol Science Co., Ltd.  

Product Name: Multi-Arc Ion Vacuum Coating Machine Magnetron Sputtering Ion Coating System Model NO.: TSU650 H Trademark: Technol Transport Package: Export Wooden Box Specification: Customize Origin: China HS Code: 8486202200 Product Description Feature:Equipped with circular magnetron sputtering target, rectangular magnetron sputtering target, multi-arc target, magnetic filter arc source, etc. Combined with magnetron, ion plating and other various functions, suitable for the universities and scientific research units with multiple coating requirements.Main Function:* The equipment can be used to prepare single and multi-layer metal film, dielectric film, semiconductor film, sensor film, heat-resistant alloy film, hard film, corrosion-resistant film, etc.;* Coating samples: silver, aluminum, copper, nickel, chromium, nickel-chromium alloy, titanium nitride, titanium carbide, titanium nitride, chromium nitride, titanium oxide, alumina, ITO, etc.;* Applications: tool, mold, electronic accessories, metal shell, ceramic substrate, etc..Application: Widely used in colleges & universities, research institutes and enterprises of device R & D and manufacturing and small batch production.Technical ParametersEquipment NameMagnetron & Ion Sputtering Combination SystemModelTSU650-HChamber StructureVertical cylindrical front door structure, double-layer water coolingChamber SizeCustomizedRotating Workpiece RackCustomizedWorkpiece Rack BakingTemperatureRoom temperature~500±5ºC(932±41ºF), adjustable and controllable(PID control temperature)Workpiece Rack Movement0-5RPM adjustableAuxiliary ion sourceBias voltage, auxiliary linear ion source(optional)CathodeRectangular magnetron target, plane arc source, magnetic filter arc source,circular flat target(optional)Control MethodPLC Control/IPC automatic control(optional)Occupied Area(Mainframe) L2780×W1200×H2020mm Power≥70kW